光ディスク用原盤の製造方法

Method for manufacturing master disk for optical disk

Abstract

PROBLEM TO BE SOLVED: To provide a method for manufacturing the master disk for an optical disk by which a pattern of minute recesses and projections of high resolution can be formed with high throughput. SOLUTION: The substrate is subjected to the surface treatment by using at least one agent selected from organic silicon compounds having at least one kind of hydrolyzable group and generating no base and vinyl polymers having at least one kind of hydrolyzable groups to obtain a surface treated medium 101 to improve the adhesion between the substrate and a resist film. A resist composition containing a medium having such reactivity that the solubility in an alkali aqueous solution changes by the reaction with an acid as a catalyst, and further containing a compound which generates as acid by irradiation of radiation is applied on the surface-treated substrate to form a resist film 103. The film is irradiated with radiation, developed and etched to form minute recesses in the substrate.
(57)【要約】 【課題】高いスループットで高解像度の微小凹凸のパタ ンが形成できる光ディスク用原盤の製造方法を提供する こと。 【解決手段】基板とレジスト膜との密着性を向上させる 表面処理媒体101として、少なくとも一種類の加水分 解基を有し、かつ、非塩基発生型の有機ケイ素化合物及 び少なくとも一種類の加水分解基を有するビニル重合体 からなる群から選ばれた少なくとも一種を用いて基板を 表面処理し、酸を触媒とする反応によりアルカリ水溶液 に対する溶解性が変化する反応性を持った媒体と、放射 線照射により酸を発生する化合物を含むレジスト組成物 を表面処理した基板上に塗布し、レジスト膜103を形 成し、さらにこれに放射線を照射し、現像し、エッチン グ処理して、基板に微少凹部を形成する。

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Cited By (4)

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    US-8848311-B2September 30, 2014Donaldson Company, Inc.Low temperature catalyst for disk drives article and method
    WO-03088235-A1October 23, 2003Nagase & Co., Ltd.Matrice de pressage d'origine et procede de fabrication de cette matrice, matrice de pressage et procede de fabrication de cette matrice et disque optique
    WO-2012003505-A2January 05, 2012Donaldson Company, Inc.Low temperature catalyst for disk drives article and method
    WO-2012003505-A3May 03, 2012Donaldson Company, Inc.Catalyseur basse température pour article de lecteur de disque et son procédé